The 13.56MHz, 3kw RF power generator developed by Wattsine adopts all-solid-state RF power amplifier technology, the operating frequency is 13.56MHz, and the output power is from 2w to 3kw. The product is designed with power module, RF generator, RF amplifier, control system, interface module and cooling system.
> Low energy consumption
> High flexibility
> Long service life
> High frequency stability and accuracy
> High power stability
> Equipped with load for any VSWR
Item | Feature |
Frequency | 13.56MHz ±5% |
Frequency stability | ±50ppm |
Output power | 2w-3000w with 0.1w stepping |
RF switch amplitude overshoot duration | 0.1mS |
RF switching amplitude overshoot | ±1% |
Pulse repetition frequency | 10Hz-100kHz with 1Hz stepping; pulse width is 5μS-90mS |
Duty cycle | 5%-95% with 1% stepping; edge < 2μS |
Overall efficiency (@ rated power) | 60% |
Harmonic output | ≤-50dBc |
Spurious output | ≤-50dBc |
Amplitude stability | ≤±0.1% |
Resist stripping and etching in semiconductor manufacturing, RIE, ICP, RF sputtering, CVD and PVC systems, plasma cleaning, and PECVD, etc.