The basic principle of RF power supply to achieve high-frequency power output is the use of oscillation circuit and power amplifier. Important components include a resonant circuit, a frequency control circuit, a power control circuit and a protection circuit.

In the oscillation circuit, the input DC is applied to the oscillator after regulation to generate high-frequency AC power. This is subsequently amplified by a power amplifier, which converts the low-energy high-frequency signal into a higher-power high-frequency signal, which is ultimately output to the driven device.