People often ask: Your product center offers so many types—RF generator, solid-state microwave generators, accelerator amplifiers, MPCVD systems, etc.—what are the differences, and where is each used?

This article will make it clear once and for all.

In fact, although names like RF generator, solid-state microwave generator, solid-state amplifier for particle accelerators, MPCVD, and RPS may seem distinct, they are all essentially solid-state RF energy sources. The differences lie in power, frequency, and form factor, serving various high-end manufacturing and scientific research fields.

It becomes much clearer when categorized by application:

I. Semiconductor & Photovoltaic Manufacturing

RF generator – Generates plasma for processes such as etching, thin-film deposition, and ion implantation. Power ranges from 1 kW to 30 kW, frequencies include 2 MHz, 13.56 MHz, 27 MHz, 40 MHz, 60 MHz, etc. Fully solid-state, digitally controlled, offering high precision and fast response.

RPS (Remote Plasma Source) – Specialized for photoresist stripping, chamber cleaning, atomic layer deposition (ALD), and similar steps. Plasma is excited remotely, avoiding wafer damage while ensuring excellent uniformity. It serves as a drop-in replacement for imported units.

Both are core components in semiconductor front-end equipment.

II. Industrial Heating, R&D & Medical Applications

Solid-State Microwave Generator – Uses semiconductor technology to generate microwave energy, replacing traditional magnetrons. Offers long lifetime, excellent controllability, and immunity to reflected power. Power ranges from 100 W to 75 kW, with frequencies primarily at 433 MHz, 915 MHz, and 2450 MHz.

Typical applications fall into three categories:

• Industrial Microwave: Microwave drying, thawing, sintering, curing, lighting, chemical metallurgy, solid-state microwave ovens, etc.

• Research & Laboratory: Plasma research, materials processing, etc.

• Medical: Tumor microwave ablation, microwave hyperthermia, microwave diathermy, etc.

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Wattsine Product Coverage: From sub‑kilowatt precision ablation devices to tens‑of‑kilowatts industrial microwave generators – full product range configurable for output power and operating modes according to different scenarios.

III. Large Scientific Facilities & Advanced Medical Equipment

Solid-State Power Amplifier for Particle Accelerators – Provides RF energy for synchrotron light sources, free‑electron lasers, BNCT (boron neutron capture therapy), cyclotrons, medical heavy‑ion accelerators, and more. Compared to traditional tube‑based solutions, all‑solid‑state designs offer greater stability, easier maintenance, and higher reliability.

Wattsine Product Coverage: Frequencies from MHz to GHz (e.g., 53.667 MHz, 324 MHz, 500 MHz, 650 MHz, 1.3 GHz); power from 40 W up to 500 kW and beyond; supports both CW and pulsed modes. Products have been deployed in multiple major national scientific facilities and medical accelerator projects across China.

Wattsine products have been successfully used in major national scientific infrastructure projects, including synchrotron light sources, free‑electron lasers, and accelerator‑driven systems.

IV. Advanced Carbon Material Synthesis

MPCVD System (Microwave Plasma Chemical Vapor Deposition) – Used for diamond material growth. Beyond lab‑grown diamonds, it produces diamond heat spreaders, optical windows, industrial tooling, etc. Supports deposition up to 12 inches, with thermal conductivity exceeding 2000 W/m·K. The core microwave source of this system is Wattsine’s own solid‑state microwave generator.

Wattsine Product Coverage: Equipment models covering 2‑inch, 4‑inch, 6‑inch, and up to 12‑inch deposition sizes; microwave power from 6 kW to 75 kW (including 915 MHz and 2450 MHz bands). Solutions are tailored for everything from laboratory R&D to industrial‑scale batch production.

If you would like to dive deeper into any product category or need specifications for a specific model, please feel free to contact us.

Tel: +86-28-85964177