The Auto-Matching RF Generatorprovide by Wattsine is the integrated versiona designed with RF power supply and automatic matcher, to provide users with smaller use space and larger scope of application. Glory designed with high-speed auto-matcher to realize fast auto-matching, has functions such as high operating stability, high-precision power regulation and fast load matching.
. Full digital control
. High-speed auto match
. High output accuracy
. High-speed output power respond
Item | Feature |
Frequency | 2MHz/13.56MHz/27.12MHz/40MHz/60MHz |
Frequency error | 0.005% |
Output power | 1500W |
Output power adjustment range | 10w-1500W |
Power mode | Forward power, load power |
Step | 1W |
Power repeatability | ±1% |
Efficiency | 60% |
Cooling | water cooling |
Communication | Analog /RS232/RS485/Ether NET /local |
RF Output interface | HN female |
CW
Semiconductor
Solar cells
Package
Plasma cleaning
Scientific research
PECVD
ICP/CCP etching
Plasma cleaning
Material modification