Products> Semiconductor equipment components > Auto-Matching RF Generator-1.5kW
13.56MHz RF Generator
solid state RF power generator
1.5kW RF power supply
Auto-Matching RF Generator-1.5kW

The Auto-Matching RF Generatorprovide by Wattsine is the integrated versiona designed with RF power supply and automatic matcher, to provide users with smaller use space and larger scope of application. Glory designed with high-speed auto-matcher to realize fast auto-matching, has functions such as high operating stability, high-precision power regulation and fast load matching.

. Full digital control

. High-speed auto match

. High output accuracy

. High-speed output power respond

Technical Index

Item

Feature

Frequency

2MHz/13.56MHz/27.12MHz/40MHz/60MHz

Frequency error

0.005%

Output power

1500W

Output power adjustment range

10w-1500W

Power mode

Forward power, load power

Step

1W

Power repeatability

±1%

Efficiency

60%

Cooling

water cooling

Communication

Analog /RS232/RS485/Ether NET /local

RF Output interface

HN female


working mode

CW

Industry

Semiconductor

Solar cells

Package

Plasma cleaning

Scientific research


Application

PECVD

ICP/CCP etching

Plasma cleaning

Material modification


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