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Microwave Plasma CVD System

HMPS-2100SP
2450MHz | 10kW
HMPS-2100SP microwave plasma CVD system is a comprehensive experimental and industrial equipment designed and developed for the preparation of monocrystalline and polycrystalline diamond in response to the market demand. HMPS-2100SP is designed with a new generation of large-volume cylindrical chamber which can provide the growth capacity of diamond material with diameter ≥3inch. It has the characteristics of advanced performance, perfect function, safe and reliable, and high degree of automation. It has been widely used in major scientific research institutes and diamond material preparation enterprises.
    • Precision Design
      Designed with the new generation of large volume cylindrical cavity, with precision design and simulation, to carry high power
    • High stability
      High frequency and power stability with Wattsine's 2450MHz-10kW solid-state power source
    • High reliability
      Designed with imported high-precision MFC to ensure the high-reliable and stable pressure control system
    • Intelligent control
      With intelligent software control system, manual / automatic control is available
    • Multi-adjustmen
      Multiple security interlocks,Multiple adjustment of sample stage
    • Multi-management
      Tiered management of multiple permissions
Technical Specifications
ModelHMPS-2100SP
Microwave frequency2450MHz,stability<±50ppm
Microwave power0.5-10kWcontinuous adjustable,stability≤1%
Reaction chamberdouble-layer water-cooled stainless steel
molybdenum sample stageφ≥80mm
ultimate vacuum degree≤3.7x10-3Torr or ≤6x10-6Torr(molecular pump)
Vacuum leakage rate≤5x1.0-10Pa.m³/s(He)
working air pressure
5-226Torr,±0.1Torr
Gas systemH₂/CH₄/N₂/O₂ (CO₂Ar is available),can be extended
Temperature measurement system300~1400℃ single color or double color 600~1800℃
Control systemPLC control, manual / automatic control available)
Dimensions2m*0.9m*1.9m
Weight820kg


Application Scope
Batch growth of polycrystalline diamonds
MPCVD设备适用于大面积、高品质多晶金刚石的批量制备
Diamond bulk growth
MPCVD设备适合大面积与高品质单晶金刚石、多晶金刚石批量生长,
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028 - 85964177
minhong.wan@wattsine.com