GLORY series RF Generator provide by Wattsine is a high-performance RF plasma generator designed with power amplifier circuit and high-speed control module. Endeavour has automatic frequency regulation (AFT) function to achieve ultrafast impedance matching, high working stability and accurate power regulation.
. Full digital control
. Pulsing and pulse synchronization(SLP)
. Phase synchronization (CEX)
. High Accuracy Low Output(0.1W stepping @<500W output power)
. Autoamtic frequency tuning(AFT)
. Dual-level Pulsing & DLP synchronization
Item | Feature |
Frequency | 2MHz/13.56MHz/27.12MHz/40MHz/60MHz |
Frequency error | 0.005% |
Output power | 6kW/10kW |
Output power adjustment range | 30w-6kW/50w-10kW |
Power mode | Forward power, load power |
Step | 1W(Min.0.1W low-power and high-precision mode,beginning at 5W) |
Power repeatability | ±0.5% |
Efficiency | 63%-6kW;60%-10kW |
Cooling | water and air cooling |
Communication | Analog/Ether CAT/RS232/Ether NET |
RF Output interface | HN female |
CW/Pulse
Semiconductor
PV
Display panel
Plasma research
ICP/CCP dry etching.
PECVD
